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Fundamental Electron Interactions with Plasma Processing Gases

Fundamental Electron Interactions With Plasma Processing Gases «

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Author(s):

James K. Olthoff, L.G. Christophorou, Loucas G. Christophorou, Loucas G. Christophorous

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ISBN

9780306480379

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Fundamental Electron Interactions with Plasma Processing Gases

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Reviews of Fundamental Electron Interactions with Plasma Processing Gases by Loucas G. Christophorou, James K. Olthoff & Loucas G. Christophorous