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Hi, I wanted to tell you about the book: Low Temperature Polymer And Sige Mems Structures For Capacitive Accelerometers by Lianggong Wen. http://www.boeklezers.com/boeken/Low+Temperature+Polymer+And+Sige+Mems+Structures+For+Capacitive+Accelerometers/9789460186448 Kind regards,
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