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Hi, I wanted to tell you about the book: Fabrication Of Poly-sige Mems Structures With A Substrate Temperature Budget Of 250c by Joumana El-Rifai. http://www.boeklezers.com/boeken/Fabrication+Of+Poly-sige+Mems+Structures+With+A+Substrate+Temperature+Budget+Of+250c/9789460185793 Kind regards,
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