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Hi, I wanted to tell you about the book: Tactile 3d Probing System For Measuring Mems With Nanometer Uncertainty by E.J.C. Bos. http://www.boeklezers.com/boeken/Tactile+3d+Probing+System+For+Measuring+Mems+With+Nanometer+Uncertainty/9789038612164 Kind regards,
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