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Hi, I wanted to tell you about the book: Integrated Modeling Of Chemical Mechanical Planarization For Sub-Micron Ic Fabrication by David Dornfeld, Jianfeng Luo & J. Luo. http://www.boeklezers.com/boeken/Integrated+Modeling+Of+Chemical+Mechanical+Planarization+For+Sub-Micron+Ic+Fabrication/9783540223696 Kind regards,
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