Vlsi Fabrication Principles

Integrating discussion of elemental (silicon) and compound (gallium arsenide) technologies, this monograph explains why the two materials are particularly suite... » 

Integrating discussion of elemental (silicon) and compound (gallium arsenide) technologies, this monograph explains why the two materials are particularly suited to Very Large Scale Integrated (VLSI) schemes. The fabrication principles for circuits such as CMOS, MOS and PET are emphasized. «