Principles of Plasma Discharges and Materials Processing

With the coverage of the fundamentals of plasma physics and chemistry, this book reflects developments in the field of plasma processing and aims to clarify the... » 

With the coverage of the fundamentals of plasma physics and chemistry, this book reflects developments in the field of plasma processing and aims to clarify the presentation of basic principles. It applies basic theory to plasma discharges, including calculations of plasma parameters. It is aimed at graduate students and researchers in the field. «