Nano- And Micro-Electromechanical Systems by Sergey Edward Lyshevski
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Nano- And Micro-Electromechanical Systems

Here in its second edition is the preparation and background knowledge students need on all aspects of NEMS and MEMS. New material includes homework problems, examples and further reading in every chapter, and a separate solutions manual. « 

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9780849328381

 
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