Micromachined Ultrasound-Based Proximity Sensors

Presents a packaged ultrasound microsystem for object detection and distance metering based on micromachined silicon transducer elements. It describes the chara... » 

Presents a packaged ultrasound microsystem for object detection and distance metering based on micromachined silicon transducer elements. It describes the characterization and the long-term stability of silicon membrane resonators as well as packaging for ultrasound microsystems. «