Materials Science in Microelectronics, Volume 1

Focusing on the relationship between processing and the structure of the thin-film, this work takes into consideration the following potential influencing facto... » 

Focusing on the relationship between processing and the structure of the thin-film, this work takes into consideration the following potential influencing factors: crystal defects, void structure, grain structure, interface structure in epitaxial films, and reaction-induced structure. It is useful for students and researchers in material science. «