An Introduction To Microelectromechanical Systems Engineering

The introduction is for scientists, engineers, students, and business executives who do not necessarily have any prior experience with what are called MEMS by t... » 

The introduction is for scientists, engineers, students, and business executives who do not necessarily have any prior experience with what are called MEMS by those who know them intimately, but do have an understanding of basic scientific concepts equivalent to first-year college physics and chemistry. Maluf and Williams, both with technology comp «