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Books

Microengineering Of Metals And Ceramics
Microengineering Of Metals And Ceramics
V. 4, Pt. 2: Special Replication Techniques, Automation, And Properties »
 
 
 
 
 

Enabling Technologies For Mems And Nanodevices
Enabling Technologies For Mems And Nanodevices
V. 14: Advanced Micro And Nano Systems »
 
 
 
 
 

Cmos-Mems
Cmos-Mems
Advanced Micro And Nanosystems »