Semiconductor Manufacturing Handbook

WORLDCLASS SEMICONDUCTOR MANUFACTURING EXPERTISE AT YOUR FINGERTIPSThis is a comprehensive reference to the semiconductor manufacturing processand ancillary fac... » 

WORLDCLASS SEMICONDUCTOR MANUFACTURING EXPERTISE AT YOUR FINGERTIPSThis is a comprehensive reference to the semiconductor manufacturing processand ancillary facilities from raw material preparation to packaging andtesting applying basics to emerging technologies. Readers charged withoptimizing the design and performance of manufacturing processes will find allthe information necessary to produce the highest quality chips at the lowestprice in the shortest time possible. The Semiconductor Manufacturing Handbookprovides leadingedge information on semiconductor wafer processes MEMSnanotechnology and FPD plus the latest manufacturing and automationtechnologies including Yield Management Automated Material Handling SystemFab and Cleanroom Design and Operation Gas Abatement and Waste TreatmentManagement And much moreWritten by 60 international experts and peer reviewed by a seasoned advisoryboard this handbook covers the fundamentals of relevant technology and itsreallife application and operational considerations for planningimplementing and controlling manufacturing processes. It includes hundreds ofdetailed illustrations and a list of relevant books technical papers andwebsites for further research. This inclusive wideranging coverage makes theSemiconductor Manufacturing Handbook the most comprehensive singlevolumereference ever published in the field.STATEOFTHEART SEMICONDUCTOR TECHNOLOGIES AND MANUFACTURING PROCESSESSEMICONDUCTOR FUNDAMENTALSHow Chips Are Designed and Made Substrates Copper and Lowk Dielectrics Silicide Formation Plasma Vacuum PhotomaskWAFER PROCESSING TECHNOLOGIESMicrolithography Ion Implantation Etch PVDALD CVD ECD Epitaxy CMP Wet CleaningFINAL MANUFACTURINGPackaging Grinding Stress Relief Dicing Inspection Measurement andTestingNANOTECHNOLOGY MEMS AND FPD GAS AND CHEMICALSSpecialty Gas System and DCA Gas A «